| 1. | Firstly , the relationship of atomic force and distance is studied . the scan type of samples and the working mode of probe is confirmed , then pzt is chosen as actuator for micro scan displacement , and optical deflexion method is used to detect the deflexion value of cantilever . after all these work , the system light path design is finished , and its mathematical model is completed
首先,分析了原子力探针系统的中原子力?距离的关系,并确定探针系统的探针的工作模式和样品的扫描模式,从而选择压电陶瓷作为扫描微位移驱动器;采用光学偏转法检测微悬臂偏转量,并选用了psd作为传感元件,并在此基础上进行了系统光路设计及其数学模型的建立。 |
